CS CLEAN SOLUTIONS · Process gas abatement
CLEANSORB FABLINE FX
Integrated backup column architecture delivering continuous operation within a reduced footprint
CLEANSORB FABLINE FX is an exhaust gas treatment system featuring an additional backup column that provides uninterrupted operation within a reduced footprint. The chemical chemisorption process itself is passive, consuming no power, heating, fuel, or water to neutralize process gases. Operating status and system modes are conveniently managed via a touch-screen display, featuring fully automated gas purging and column leak testing. Advanced remote connectivity is supported through USB, Ethernet, FTP, NTP, and OPC protocols. Manufactured from corrosion-resistant 316L stainless steel, FABLINE FX offers diverse configurations including an integrated fan and an optional SEMI-S2 compliant version equipped with redundant safety features.
Technical Features
Integrated backup column architecture delivering continuous operation within a reduced footprint
Touch-screen control with automated gas purging routines and absorber leak testing
Advanced remote connectivity via USB, Ethernet, FTP, NTP, and OPC protocols
Applications
- Continuous-duty Plasma Etching and Chemical Vapor Deposition (CVD) process lines
- High-uptime Atomic Layer Deposition (ALD), Ion Implantation, and CIGS Photovoltaics lines
Configuration and Selection
The absorber reaction operates passively; controls, fans and auxiliary equipment may require utilities. Capacity, media selection, replacement intervals and safety options depend on gas composition, concentration, flow and system configuration. Confirm the selected configuration with NOVEL and the manufacturer.
- Is an uninterrupted backup column required during primary column exchange?
- Is remote automation via Ethernet, OPC, or FTP needed for your facility?
- Does your physical layout require a reduced-footprint cabinet configuration?