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New Cosmos XP-703DIII – Dopant Gas Leak Detector (Portable)

Gas Detectors and Industrial Measurement Instruments

New Cosmos XP-703DIII – Dopant Gas Leak Detector (Portable) product image

The New Cosmos XP‑703DIII is a portable, automatic-suction gas leak detector designed to locate leaks of semiconductor process gases such as AsH₃, PH₃, B₂H₆, SiH₄, and H₂. Responding rapidly at extremely low levels (ppb), it detects even minute leaks; the leakage point is pinpointed via selectivity adjustment. It ensures dependable inspection with audible/visual alarms, automatic zero adjustment, and 12-hour battery life.

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Manufactured entirely by New Cosmos, the world's leading sensor manufacturer, the XP-703DIII Gas Leak Detector features an ultra-fast response time and high sensitivity capable of operating even at extremely low concentrations. With both its cost efficiency and long-life sensor architecture, it represents the cutting edge of gas leak searching technology.

The XP-703DIII Gas Leak Detector detects leaks of gases generated during semiconductor manufacturing and emits an audible and visual alarm warning when the ambient gas concentration exceeds the preset threshold, allowing you to intervene to prevent gas leakage.

The XP-703DIII Gas Leak Detector is a measuring instrument with high accuracy that operates using metal oxide semiconductors. It detects changes in electrical conductivity resulting from oxidation reactions and flammable gases formed on the surface of oxide semiconductors.


Product Specifications
  • Practical, Compact, Lightweight, and Robust Construction
    With its exceptionally compact and lightweight design, it occupies very little space. This allows you to carry the instrument easily during your site operations. Gas concentration and alarm indications can be easily read from the display.

  • All the Solutions You Need in Semiconductor Manufacturing
    With this instrument, all gases released in semiconductor manufacturing facilities, such as hydrogen, arsine, silane, phosphine, and diborane, can be easily detected even in the event of an extremely minor leak.

  • Advanced Automation and Safety
    Thanks to automatic pump stop and gas exhaust functions, you can operate the instrument with ease. With a soft protective case equivalent to IP22, it is resistant to dust, water, and issues resulting from touch. Thanks to audible and visual alarms located at multiple positions on the instrument, the operator can readily observe gas leaks and warnings.

  • Long Battery Life
    You can operate the instrument for 12 hours on two AA batteries.

  • You can detect gases using hot-wire semiconductor sensor technology.

  • You can use it for the detection of toxic gases released in semiconductor manufacturing plants, such as hydrogen, arsine, silane, phosphine, and diborane.

  • You can operate it safely with its soft external case equivalent to IP22 protection class.

  • According to changes in gas concentration, the pitch rate of the alarm tone changes progressively. When the concentration is very high, the alarm tone sounds continuously, allowing you to pinpoint the location of the leak.

  • Thanks to the audible and visual alarm, you receive a warning when the gas concentration exceeds the preset value.

  • It is significantly smaller and lighter than comparable products. It fits comfortably in your hand.

  • Thanks to the LCD screen, you can easily view instrument and pump status as well as remaining battery level.

  • Thanks to alarm lights located on the front and underside, you can readily notice warnings received during operation.

  • Accessories

    Soft Case
    The soft protective case equivalent to IP22 protection class protects the instrument against dust, water, and fingerprint marks.

    Drain Filter
    Protects the instrument from dust, water, and other foreign matter. Can be fitted to the instrument underneath the soft case.

    Dust Filter
    Prevents dust from entering the sensors of the instrument and provides protection against dust.

    Gas probe
    Facilitates sampling under special conditions and accommodates a wide variety of conditions thanks to its modular design.

    Hose
    The instrument is supplied complete with the hose used for sampling.

    Hand Strap
    Provides great convenience to the operator during gas detection thanks to the hand strap that simplifies carrying.

    Battery and User Manual
    The instrument comes complete with two AA alkaline batteries and one user manual.

    Technical Specifications

    Show Technical Details
    Model XP-703D III
    Detected Gas Hydrogen (H2), Arsine (AsH3), Diborane (B2H6), Silane (SiH4) and Phosphine (PH3)
    Detection Principle Hot-Wire Semiconductor Sensor
    Sampling Method Suction Type
    Minimum Detectable Gas Volume H2: 5.07 × 10-7, AsH3: 2.53 × 10-7, B2H6: 1.01 × 10-7, SiH4: 2.53 × 10-7, PH3: 1.52 × 10-7
    Minimum Detectable Gas Concentration H2: 1.0ppm, AsH3: 0.5ppm, B2H6: 0.2ppm, SiH4: 0.5ppm, PH3: 0.3ppm
    Response Time within 10 seconds
    Power Supply / Battery Life AA alkaline battery x 2 - Continuous 12-hour operating time
    Certificates IP22, CE Marking
    Operating Pressure Atmospheric Pressure (800 to 1100 hPa)
    Operating Temperature / Humidity 0 to +40 °C, 85%RH humidity and below (non-condensing)
    Dimensions and Weight 38mm x 130mm x 32mm + Approx. 190g (including case and battery)
    Standard Accessories Soft Case, Drain Filter, Dust Filter, Gas probe, Hose, Hand Strap, 2x AA alkaline battery, User Manual
    Optional Accessories Copper sampling tube, gas collector kit, sampling hose, etc.

    Gas Detection and Standards Approach

    Gas detection approach: Gas type, target measurement range, alarm purpose, sampling/diffusion method, sensor principle and site atmosphere must be evaluated together. For toxic and special process gases, the EN 45544 series and the facility's process safety requirements must be taken into account. These statements do not imply that the model is certified to all standards; exact compliance must be confirmed separately according to model code, target gas, and certificate version.

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    Notice: The technical information, product specifications and images on this page are based on manufacturer publications. The manufacturer may change specifications without notice. For current specifications or assistance in selecting a suitable product for your application, please contact NOVEL at info@novel.com.tr .

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